@article{deeba2015optical,
  title = {Optical emission spectroscopy of 2.45 GHz microwave induced plasma},
  author = {F. Deeba and A. Qayyum and Nasir Mahmood},
  year = 2015,
  url = {https://ibimapublishing.com/articles/SPEC/2015/172302/},
  journal = {Journal of Research in Spectroscopy},
  volume = 2015 (2015),
  pages = 12,
  doi = 10.5171/2015.172302,
  abstract = {Optical emission spectroscopy measurements are performed to obtain the electron temperature and electron number density of argon plasma in 2.45 GHz microwave discharge for different filling pressures (0.4 - 0.7 mbar). Emission spectrum ranging from (380-710 nm) is recorded in axial and radial directions by using ocean spectrometer (HR4000). The electron temperature is determined from the slope of Boltzmann’s plot that uses the intensity of several spectral lines versus their corresponding excitation energies. The electron number density is determined from the Stark broadening of well-isolated Ar-I (696.54 nm) spectral line after de-convolution of the Voigt profile. It is observed that electron temperature and electron number density is higher when optical emission is recorded in axial direction in comparison with radial direction. This fact may be ascribed to energy loss of electromagnetic wave as it propagates along the plasma column, which makes the plasma parameters to vary continuously along the discharge region.
  },
  keywords = {Microwave induced plasma, optical emission spectroscopy, plasma parameters, Stark-broadening.},
  note = Article ID: 172302
}