Optical emission spectroscopy of 2.45 GHz microwave induced plasma
Journal of Research in Spectroscopy
Optical emission spectroscopy measurements are performed to obtain the electron temperature and electron number density of argon plasma in 2.45 GHz microwave discharge for different filling pressures (0.4 - 0.7 mbar). Emission spectrum ranging from (380-710 nm) is recorded in axial and radial directions by…